Ruthenium laser cleaning visualization showing process effects
Yi-Chun Lin
Yi-Chun LinPh.D.Taiwan
Laser Materials Processing
Published
Jan 6, 2026

Ruthenium

Ruthenium Machine Settings

Optimal laser parameters and operating ranges for effective cleaning

Wavelength

1,064
nm
355
1,064
1.1e4

Spot Size

200
μm
0.1
200
500

Energy Density

1
J/cm²
0.1
1
20

Pulse Width

20
ns
0.1
20
1,000

Scan Speed

500
mm/s
10
500
5,000

Pass Count

2
passes
1
2
10

Overlap Ratio

50
%
10
50
90

Laser Power

45
W
1
45
120

Laser Power Alternative

200
W
50
200
500

Frequency

50
kHz
1
50
200

Ruthenium Material Safety

Shows damage risk across parameter space. Green = safe, Red = damage danger.
WARNING
Fluence:3.98 J/cm²
From optimal:54%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Ruthenium Energy Coupling

Shows laser energy transfer efficiency. Green = high coupling (energy absorbed), Red = poor coupling (energy reflected).
MODERATE
Fluence:— J/cm²
From optimal:42%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Ruthenium Thermal Stress Risk

Shows thermal stress and distortion risk. Green = low stress risk, Red = high stress/warping/cracking risk.
ELEVATED
Fluence:— J/cm²
From optimal:50%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Ruthenium Cleaning Efficiency

Shows cleaning performance across parameter space. Green = optimal effectiveness, Red = ineffective.
GOOD
Fluence:3.98 J/cm²
From optimal:29%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Ruthenium Heat Buildup

Excellent

Heat Safety

Heat Control

Cooling Efficiency

Pass Optimization

📈 Heat Profile

Safe (<150°C)
Damage (>250°C)
0°C100°C200°C300°C✓ Safe🚨 Damage20°CPass 1Pass 2

🔧 Laser Settings

Pulse Energy:2000.00 mJ
Total Sim Time:60.4s

🌡️ Live Temperature

20°C
✅ Safe
Pass 1 of 2
Time: 0.0s / 60.4s

▶️ Simulation Controls

Ruthenium Dataset

Download Ruthenium properties, specifications, and parameters in machine-readable formats
49
Variables
0
Laser Parameters
0
Material Methods
11
Properties
3
Standards
3
Formats
View all Metal datasets

License: Creative Commons BY 4.0 • Free to use with attribution •Learn more

Parameter Relationships

WavelengthSpotSizeEnergyDensityPulseWidthScanSpeedPassCountOverlapRatioLaserPowerLaserPowerAlternativeFrequency

Spot Size

Directly affects Scan Speed and Energy Density. Increase this to amplify downstream effects.

Energy Density

Smaller spots concentrate energy into a smaller area.

Scan Speed

A bigger spot lets you scan faster while keeping good coverage.

Get Started

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