What laser wavelengths are most effective for cleaning ruthenium-coated mirrors without **causing delamination**?

**1064 nm minimizes delamination**. Notably, for ruthenium-coated mirrors, the 1064 nm near-IR laser wavelength excels in oxide removal at 2.3 J/cm² fluence. It minimizes delamination by targeting the thin film's absorption, thus preventing substrate harm. The 532 nm green light serves as an alternative, but specifically demands stricter pulse control to preserve coating adhesion. This method achieves uniform cleaning across two passes at 500 mm/s scan speed.

How does ruthenium's **high reflectivity** affect the efficiency of laser cleaning processes on optical surfaces?

**Impedes absorption, slows efficiency**. Ruthenium shows high reflectivity, particularly 70-90% across visible and IR ranges, which scatters substantial laser energy on optical surfaces and hinders absorption, thereby reducing cleaning efficiency. Address this challenge using a 1064 nm wavelength with 8 ns pulses at 2.3 J/cm² fluence, thus improving targeted oxide removal while preventing bulk damage.

Are there specific safety risks when using pulsed lasers to remove contaminants from ruthenium alloys in semiconductor manufacturing?

Pulsed laser cleaning of ruthenium alloys at 1064 nm can trigger ruthenium oxide formation, particularly when fluence exceeds 2.3 J/cm², thus releasing potentially toxic vapors. Airborne nanoparticles from ablation pose inhalation hazards, so adhere to OSHA ventilation standards using local exhaust systems to capture fines under 50 μm spot size.

What pulse energy levels should be used to avoid thermal damage when laser cleaning **ruthenium thin films** on substrates?

**fluences below 1 J/cm²**. For laser cleaning of ruthenium thin films, target pulse fluences below 1 J/cm² to avoid thermal damage to underlying substrates. Specifically at 1064 nm with 8 ns pulses, this threshold enables selective oxide ablation while curbing heat buildup—thus, apply interferometry for real-time surface monitoring.

In laser cleaning of ruthenium catalysts, how can we prevent chemical reactions with residual surface impurities?

To protect ruthenium catalysts against reactions with surface impurities during laser cleaning, conduct the process under an inert argon atmosphere, specifically at 1064 nm wavelength and 2.3 J/cm² fluence, for precise oxide removal. Then, passivate the surface via controlled exposure, thus forming a protective layer that curbs its high catalytic reactivity.

What are the common issues with **residue removal on ruthenium** surfaces using femtosecond lasers versus nanosecond lasers?

**Femtosecond enables non-thermal ablation**. Femtosecond lasers, particularly via precise non-thermal ablation, effectively remove ruthenium residues, producing minimal heat-affected zones and enhanced surface integrity compared to nanosecond systems. These ns systems frequently induce thermal damage or incomplete cleaning at 2.3 J/cm² fluence. Notably, electronics case studies demonstrate fs's cleaner outcomes, yet with 20-30% slower rates than ns at 50 kHz repetition.

How does **ruthenium's melting point** influence the choice of laser power for surface treatment in jewelry applications?

**Allows 45 W without fusion**. Notably, ruthenium's high melting point of 2334°C enables laser powers near 45 W for jewelry cleaning, vaporizing surface oxides while avoiding base material fusion. Its moderate thermal conductivity thus requires precise fluence control at 2.3 J/cm² to avoid heat buildup and keep contaminant removal superficial.

What regulatory standards apply to **handling ruthenium dust** generated during laser cleaning in industrial settings?

**Classifies as hazardous toxic waste**. When managing ruthenium dust produced by laser cleaning, adherence to EPA standards for toxic metal waste is crucial, designating it as hazardous for safe disposal while capping airborne exposure at under 0.1 mg/m³ per OSHA PEL. Particularly under REACH, EU operators must register ruthenium particulates and ensure ventilation during 2.3 J/cm² fluence operations, thus reducing inhalation hazards in electronics or aerospace settings.

Can laser cleaning restore the optical properties of ruthenium-coated EUV lithography mirrors after contamination?

Yes, laser cleaning notably restores ruthenium-coated EUV lithography mirrors, recovering reflectivity above 95% at 13.5 nm following contamination. Specifically, a 1064 nm wavelength with 2.3 J/cm² fluence and 45 W power ablates oxides cleanly without substrate damage, thus preserving low surface roughness per ASML protocols.

Ruthenium surface undergoing laser cleaning showing precise contamination removal

Yi-Chun LinPh.D.Taiwan

Laser Materials Processing

Ruthenium Laser Cleaning Settings

When laser cleaning Ruthenium, you'll want to contrast it with softer non-ferrous metals like aluminum. Ruthenium stands out for its extreme hardness and density, which make it resist deformation better than those. This means you must start with controlled pulses to avoid uneven ablation. Watch out here—its high reflectivity bounces most laser energy away, so mid-process, you need to increase overlap without overheating. Make sure you adjust scan speed slower than for copper, since Ruthenium conducts heat quickly and evenly. That spreads energy well, but it cuts risk of cracks if you keep passes minimal. You should test on scrap first, as its corrosion resistance holds up post-clean but demands gentle settings to preserve shine.

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Ruthenium Machine Settings

Power Range

120

Wavelength

1,064

355

1,064

1.1e4

Spot Size

μm

0.1

500

Repetition Rate

kHz

200

Energy Density

2.3

J/cm²

0.1

2.3

Pulse Width

0.1

1,000

Scan Speed

500

mm/s

500

5,000

Pass Count

passes

Overlap Ratio

Ruthenium Material Safety

Shows damage risk across parameter space. Green = safe, Red = damage danger.

Pulse

DANGER

Fluence:45.84 J/cm²

From optimal:58%

Pulse Duration (ns)

1000

750

500

250

100

120

Power (W)

Ruthenium Energy Coupling

Shows laser energy transfer efficiency. Green = high coupling (energy absorbed), Red = poor coupling (energy reflected).

Pulse

SUBOPTIMAL

Fluence:— J/cm²

From optimal:50%

Pulse Duration (ns)

1000

750

500

250

100

120

Power (W)

Ruthenium Thermal Stress Risk

Shows thermal stress and distortion risk. Green = low stress risk, Red = high stress/warping/cracking risk.

Pulse

LOW-MODERATE

Fluence:— J/cm²

From optimal:33%

Pulse Duration (ns)

1000

750

500

250

100

120

Power (W)

Ruthenium Cleaning Efficiency

Shows cleaning performance across parameter space. Green = optimal effectiveness, Red = ineffective.

Pulse

MODERATE

Fluence:45.84 J/cm²

From optimal:38%

Pulse Duration (ns)

1000

750

500

250

100

120

Power (W)

Ruthenium Heat Buildup

See if your multi-pass cleaning will overheat and damage the material

Excellent

91°C+159°C

Heat Safety

100%40%

Heat Control

86%25%

Cooling Efficiency

83%20%

Pass Optimization

66%15%

📈 Heat Profile

Safe (<150°C)

Damage (>250°C)

🔧 Laser Settings

Power: 45W

Rep Rate: 0 kHz

Scan Speed: 500 mm/s

Pass Count: 2

Cooling Time: 30s

Pulse Energy:900.00 mJ

Total Sim Time:60.4s

🌡️ Live Temperature

20°C

✅ Safe

Pass 1 of 2

Time: 0.0s / 60.4s

▶️ Simulation Controls

Animation Speed: 1×

Diagnostic & Prevention Center

Proactive strategies and reactive solutions for ruthenium

🌡️thermal management

Heat accumulation

Impact: Excessive heat can damage substrate or alter material properties

Solutions:

✓Reduce repetition rate
✓Increase scan speed
✓Add cooling time between passes

Prevention: Monitor surface temperature and adjust parameters accordingly

🔍surface characteristics

Variable surface roughness

Impact: Inconsistent cleaning results across different surface textures

Solutions:

✓Adjust energy density based on surface condition
✓Use multiple passes with progressive settings
✓Pre-characterize surface before cleaning

Prevention: Standardize surface preparation procedures

Ruthenium Dataset Download

Variables

Parameters

Parameter Relationships

Shows how changing one parameter physically affects others. Click any node to see its downstream impacts and role.

Power Range

Amplifies damage risk in Pulse Width and Energy Density. Keep low to maintain safety margins.

Spot Size

Same power in a smaller spot creates much higher energy density.

Energy Density

Higher power delivers more energy per pulse, removing more material.

Pulse Width

More power means higher peak intensity. Too much can damage the material.

Pass Count

Using more passes means you can use lower power and still get the job done.

Ruthenium Laser Cleaning Settings

Ruthenium Machine Settings

Power Range

Wavelength

Spot Size

Repetition Rate

Energy Density

Pulse Width

Scan Speed

Pass Count

Overlap Ratio

Ruthenium Material Safety

Ruthenium Energy Coupling

Ruthenium Thermal Stress Risk

Ruthenium Cleaning Efficiency

Ruthenium Heat Buildup

Excellent

Heat Safety

Heat Control

Cooling Efficiency

Pass Optimization

📈 Heat Profile

🔧 Laser Settings

🌡️ Live Temperature

▶️ Simulation Controls

Diagnostic & Prevention Center

🌡️thermal management

Heat accumulation

🔍surface characteristics

Variable surface roughness

Ruthenium Dataset Download

Parameter Relationships

Power Range

Spot Size

Energy Density

Pulse Width

Pass Count

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