Silicon laser cleaning visualization showing process effects
Todd Dunning
Todd DunningMAUnited States
Optical Materials for Laser Systems
Published
Jan 6, 2026

Silicon Settings

Silicon Machine Settings

Optimal laser parameters and operating ranges for effective cleaning

Wavelength

1,064
nm
355
1,064
1.1e4

Spot Size

200
μm
0.1
200
500

Fluence Threshold

2.5
J/cm²
0.3
2.5
4.5

Pulse Width

20
ns
0.1
20
1,000

Scan Speed

1,000
mm/s
10
1,000
5,000

Pass Count

2
passes
1
2
10

Overlap Ratio

60
%
10
60
90

Energy Density

0.5
J/cm²
0.1
0.5
20

Laser Power

25
W
1
25
120

Laser Power Alternative

50
W
10
50
200

Frequency

50
kHz
1
50
200

Silicon Material Safety

Shows damage risk across parameter space. Green = safe, Red = damage danger.
WARNING
Fluence:3.98 J/cm²
From optimal:54%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Silicon Energy Coupling

Shows laser energy transfer efficiency. Green = high coupling (energy absorbed), Red = poor coupling (energy reflected).
MODERATE
Fluence:— J/cm²
From optimal:42%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Silicon Thermal Stress Risk

Shows thermal stress and distortion risk. Green = low stress risk, Red = high stress/warping/cracking risk.
ELEVATED
Fluence:— J/cm²
From optimal:50%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Silicon Cleaning Efficiency

Shows cleaning performance across parameter space. Green = optimal effectiveness, Red = ineffective.
GOOD
Fluence:3.98 J/cm²
From optimal:29%
Pulse Duration (ns)
1000
750
500
250
0
0
33
67
100
133
167
200
Power (W)

Silicon Heat Buildup

Excellent

Heat Safety

Heat Control

Cooling Efficiency

Pass Optimization

📈 Heat Profile

Safe (<150°C)
Damage (>250°C)
0°C100°C200°C300°C✓ Safe🚨 Damage20°CPass 1Pass 2

🔧 Laser Settings

Pulse Energy:2000.00 mJ
Total Sim Time:60.2s

🌡️ Live Temperature

20°C
✅ Safe
Pass 1 of 2
Time: 0.0s / 60.2s

▶️ Simulation Controls

Silicon Dataset

Download Silicon properties, specifications, and parameters in machine-readable formats
39
Variables
0
Laser Parameters
0
Material Methods
11
Properties
3
Standards
3
Formats
View all Semiconductor datasets

License: Creative Commons BY 4.0 • Free to use with attribution •Learn more

Parameter Relationships

Shows how changing one parameter physically affects others. Click any node to see its downstream impacts and role.
WavelengthSpotSizeFluenceThresholdPulseWidthScanSpeedPassCountOverlapRatioEnergyDensityLaserPowerLaserPowerAlternativeFrequency

Spot Size

Directly affects Scan Speed and Energy Density. Increase this to amplify downstream effects.

Scan Speed

A bigger spot lets you scan faster while keeping good coverage.

Energy Density

Smaller spots concentrate energy into a smaller area.

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