FDA
FDA 21 CFR 1040.10 - Laser Product Performance Standards
Yi-Chun LinPh.D.Taiwan
Laser Materials ProcessingPublished
Dec 11, 2025
Silicon Carbide Laser Cleaning
We've found Silicon Carbide excels in harsh environments because its unmatched hardness and heat resistance keep structures intact where other ceramics fail, so it powers everything from aerospace parts to power electronics without breaking down.
Laser-Material Interaction
Porosity
0.005
0
0.005
0.05
Ablation Threshold
3
J/cm²
2
3
5
Thermal Destruction
3,103
K
273
3,103
3,900
Specific Heat
671
J/(kg·K)
250
671
2,500
Laser Reflectivity
0.2
0.05
0.2
0.4
Thermal Conductivity
370
W/m·K
1.4
370
127
Thermal Expansion
4e-6
K^{-1}
3e-6
4e-6
1.1e-5
Laser Absorption
0.8
0.35
0.8
2,625
Thermal Diffusivity
0
m^2/s
1e-6
0
7.3e-5
Laser Damage Threshold
25.3
J/cm²
1.6
25.3
20.9
Silicon Carbide Laser Cleaning Material Characteristics
Electrical Resistivity
0
Ω·m
0
0
1e14
Fracture Toughness
4.6
MPa√m
0.56
4.6
5.7
Youngs Modulus
450
GPa
40
450
679
Oxidation Resistance
1,600
°C
0
1,600
2,310
Density
3.2
g/cm³
1.7
3.2
16.3
Hardness
27.5
GPa
6.7
27.5
3,150
Corrosion Resistance
1e6
Ω·cm²
0
1e6
262
Compressive Strength
3,900
MPa
95
3,900
4,090
Flexural Strength
450
MPa
45.6
450
1,153
Tensile Strength
414
MPa
5
414
600
Silicon Carbide (SiC) surface magnification
Before Treatment
We've found that before laser cleaning, the Silicon Carbide surface at 1000x shows a rough, uneven layer of contaminants clinging tightly to the material. Dark spots and irregular patches cover most of the area, making the texture look pitted and dirty overall. This buildup hides the underlying structure and blocks clear views of the grains.
After Treatment
After the treatment, the same view reveals a smooth, uniform surface where contaminants have vanished completely. The material now appears clean and reflective, with even grains standing out
Regulatory Standards & Compliance
ANSI
ANSI Z136.1 - Safe Use of Lasers
IEC
IEC 60825 - Safety of Laser Products
OSHA
OSHA 29 CFR 1926.95 - Personal Protective Equipment
Silicon Carbide Laser Cleaning Laser Cleaning FAQs
Q: What laser wavelengths are best for cleaning silicon carbide surfaces without causing thermal damage?
A: 1064 nm prevents cracking risk. For cleaning silicon carbide, 1064 nm near-IR wavelengths from Nd:YAG or fiber lasers prove ideal. SiC absorbs efficiently in this range without excessive heat buildup, particularly given its high thermal conductivity that risks cracking. Maintain fluence at 2.5 J/cm² with 10 ns pulses to vaporize contaminants while sparing the substrate. Thus, this method delivers uniform results in semiconductor applications.
Q: How does the high hardness of silicon carbide impact the effectiveness of laser ablation in cleaning processes?
A: Requires 2.5 J/cm² fluence. With a Mohs hardness of 9.5, silicon carbide shows exceptional resistance to laser ablation, particularly demanding a fluence threshold of 2.5 J/cm² for contaminant removal—far above levels for softer metals like aluminum. Thus, precise 1064 nm wavelength settings and 50% beam overlap are essential to achieve clean, undamaged surfaces in semiconductor applications.
Q: What are common contaminants on silicon carbide components that laser cleaning targets, such as in semiconductor or aerospace parts?
A: Removes oxides, residues, deposits. Particularly in semiconductor and aerospace SiC components, laser cleaning removes oxides, machining residues, and carbon deposits effectively without substrate damage, due to its high selectivity. A 1064 nm wavelength combined with fluence over 2.5 J/cm² ensures precise ablation of contaminants while upholding SiC's thermal stability. Thus, this method proves essential in electronics fabrication to sustain surface integrity.
Q: Is laser cleaning safe for silicon carbide used in high-temperature applications like turbine blades?
A: Avoids microcracking hexagonal structure. Yes, laser cleaning remains safe for silicon carbide, particularly in high-temperature applications such as turbine blades. Employing a 1064 nm wavelength and 2.5 J/cm² fluence prevents microcracking its hexagonal structure or phase shifts. Notably, SiC's thermal shock resistance manages 100 W power effectively. Thus, always use eye goggles and properly contain dust.
Q: What pulse duration and energy density settings are recommended for fiber lasers when cleaning silicon carbide ceramics?
A: For cleaning silicon carbide ceramics via fiber lasers, particularly to ablate contaminants without excess heat, I recommend 10 ns pulses at 2.5 J/cm² fluence. This approach avoids melting near 2700°C. Notably, nanosecond durations surpass picoseconds for most SiC tasks, thus matching IPG Photonics' precision guidelines.
Q: Can laser cleaning remove oxide layers from silicon carbide without introducing defects in its crystalline structure?
A: Preserves crystalline structure. Yes, laser cleaning effectively removes oxide layers from silicon carbide without harming its crystalline structure, drawing on the material's chemical inertness to prevent unwanted reactions. Specifically, a 1064 nm wavelength with fluence around 2.5 J/cm² enables precise ablation, sidestepping graphitization or sublimation. Thus, SEM inspections reveal smooth, defect-free surfaces afterward.
Q: What safety precautions are needed when laser cleaning silicon carbide in industrial settings, including fume handling?
A: In industrial laser cleaning of silicon carbide, follow OSHA standards, particularly with Class 4-rated eyewear and enclosures at the 1064 nm wavelength to protect against beam hazards. SiC's inert properties notably reduce risks, yet thus, implement local exhaust ventilation to capture released silicon particulates or volatile organics from contaminants, maintaining exposure below 5 mg/m³.
Q: How do the thermal properties of silicon carbide influence the choice of laser power for surface treatment and cleaning?
A: Enables 100 W without damage. Notably, silicon carbide's thermal conductivity of 490 W/m·K enables rapid heat dissipation, supporting laser powers near 100 W for effective wafer surface cleaning without damage. Its low thermal expansion thus prevents uneven heating and distortion in semiconductor processes. Target a fluence of 2.5 J/cm² to balance contaminant removal with material integrity.
Q: What are the regulatory requirements for laser cleaning silicon carbide in automotive or aerospace manufacturing?
A: Demands ISO 11146 compliance. In the automotive and aerospace industries, particularly when laser cleaning silicon carbide, ISO 11146 compliance ensures precise beam characterization to avoid substrate damage. For engine components, traceability protocols prove vital, specifically monitoring processes at 100 W power and 2.5 J/cm² fluence. Subsequently, apply non-destructive testing to verify surface integrity while preserving SiC's semiconductor properties.
Silicon Carbide Laser Cleaning Dataset Download
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